This article describes methods for the computer aided design of electron and ion beam columns for the integrated circuit ic manufacturing industry. Munro, eric chairman at munros electron beam software ltd and owner, munros electron beam software ltd london, united kingdom 204 connections. Electronbeam sources and chargedparticle optics 1995. Abstract in computing the optical properties of electron and ion beam columns, the actual beam blur needs to be obtained from the computed aberration coefficients of the column and the beam parameters. Mebs software packages are considered industry standards and are used by the majority of u. The simulation includes the modelling of cathode emission and the effects of volumetric space charge. Igun can handle 2d rectangular and axisymmetric problems with space charge considerations. Munros electron beam software limited officers free.
Elsevier microelectronic engineering 4142 1998 163166 microectroic engineering tolerancing of electron beam lithography columns h. Northavon business centre, dean road, yate, bs37 5nh. What is the abbreviation for munro s electron beam software. Develops and provides software for simulation, design and optimisation of charged particle. We consider low energy beam of 5 kev, since larger aperture angle is needed to suppress diffraction effect at low energy. Expert consultancy services in the design of electron and ion beam devices and systems. Xieqing is now enjoying his retirement, but three members of the original team, eric, john and haoning pictured on the left are still active within the company. Currently registered at 14 cornwall gardens sw7 4an, london the company has been in the business for 29 years. Eric munro, has over 100 personyears of expertise in electronoptical design, simulations and. List of companies where john andrew rouse was involved. The apparatus has at least one magnetic doublet lens. Eric munro, has over 100 personyears of expertise in electron optical design, simulations and analysis.
State of the art charged particle optical system design tools to maximize the designers productivity and creativity. Learn about working at munro s electron beam software ltd. Electron optics for low energy electron microscopy. Simulation of electron behavior in pig ion source for 9mev. For designing new and better electron and ion beam columns for use at the cutting edge of these technologies, accurate and sophisticated simulation software is indispensable, and the development. Munro s electron beam software ltd, 14 cornwall gardens, london sw7 4an, u. Founded in 1991, munro s electron beam software, classified under reg no. Humphries, three dimensional charged particle optics and gun design, field precision llc, crc press, albuquerque, new mexico u. Simulation of coulomb interaction effects in electron sources. Munros electron beam software ltd, 14 cornwall gardens. Zhu munros electron beam software ltd, 14 cornwall gardens, london sw7 4an, u. See who you know at munro s electron beam software ltd, leverage your professional network, and get hired. He has worked on theory and software for high order aberrations, discrete coulomb interaction effects, and differential algebraic methods, and has published over 50 papers. Computational modeling techniques in chargedparticle optics.
The techniques described include computation of field distributions in electron lenses and deflectors, electron trajectories and aberrations, dynamic corrections, effects of discrete coulomb interactions, design of electron guns, treatment of. Munro s electron beam software limited free company check. Genya graduated from tohoku university with an ms in physics. Munros electron beam software limited company profile endole. The device includes one or more accelerating plates with holes aligned for beam passage. Our sister company munro s electron beam software ltd. Pdf electron optics for low energy electron microscopy. Us7282727b2 electron beam directed energy device and. Request pdf simulation software for designing electron and ion beam equipment electron and ion beam equipment. In 1991 he founded his own company, munro s electron beam software ltd.
Munros electron beam software munros electron beam. We then describe the two main simulation software packages that have been used in the electron optical design 1 projection, for optimizing the aberrations to fifthorder, including the electron lenses, deflectors, stigmators and dynamic focus coils, and 2 boerscha, for computing the combined effects of the aberrations and discrete. Specialised software for the computer aided design of electron and ion optical systems. Munro, munros electron beam software software catalogue, mebs ltd, 2010. A method and apparatus is disclosed for an electron beam directed energy device. Munros electron beam software ltd company profile and. Volumetric space charge effects are significant in such guns and a three dimensional solution of poissons equation is required. Simulation software for designing electron and ion beam equipment. Munro s electron beam software limited is an active company incorporated on 30 july 1991 with the registered office located in london, greater london. Optics is a software package developed by mebs ltd. John andrew rouse currently holds the position of a secretary in munro s consultancy services ltd. Munro s electron beam software limited 02633393 company.
Munros electron beam software ltd company profile and news. Simulation of electron optical systems by differential. John andrew rouse personal appointments free information. A read is counted each time someone views a publication summary such as the title, abstract, and list of authors, clicks on a figure, or views or downloads the fulltext. Develops and provides software for simulation, design and optimisation of charged particle optical systems, especially electron microscopes, and equipment for the semiconductor manufacturing industry. Munros electron beam software limited in london sw7 4an. For designing new and better electron and ion beam columns for use at the cutting. Simulation software has been written to calculate the properties of electron guns which have flat cathodes and a fully threedimensional electrode structure. Beam electronics and software engineering innovation. He has much experience in the field of electron optics, having worked for hitachi ltd. Mebs develops the software packages and the whole of the mebs software suite is available to mcs designers and.
A novel method for higher order aberration correction in. Simulation software beamish for the design of chargedparticle optical instruments. Cpo10 abstracts cpo10 tenth international conference on. Munro s electron beam software limited free company information from companies house including registered office address, filing history, accounts, annual. An aperture scatter filter is interposed between the two lenses of the magnetic doublet lens. Munro s electron beam software limited has been running for 28 years. Comprehensive analysis of electron optical design of scalpel. On a scientific level, mebs has contributed to the development of aberration theory of general combinations of electron lenses and deflectors, multipole systems, electron guns.
Munro, a set of computer programs for calculatin g of properties electron lenses. Abstract over many years, we have developed electron source simulation software that has been used widely in the electron optics community to aid the development of rotationally symmetric electron and ion guns. Electron and ion optical design software for integrated. Munro s electron beam software ltd was founded in 1991.
The field size of electron optics is limited by offaxis aberrations, prohibiting the. S, european and asian manufacturers of electron and ion beam equipment for the design and analysis of electron microscopes and electron lithography machines, e beam testers, crts, photomultiplier tubes, e beam welding guns, ion beam systems, aberration. Simulation methods for multipole imaging systems and. Mcs aim to make state of the art software tools and design expertise available to charged particle optical system manufacturers. Rouse, eric munro, liping wang, haoning liu munro s electron beam software ltd. Munros electron beam software limited free company information from companies house including registered office address, filing history. Design of practical deflection field in nanometerscale.
Mebs program 15 showed that at this convergence angle, diffraction aberration is dominant over beam size on the. Our seven software families each consist of a base package, which provides the core functionality, and a range of upgrade modules which integrate seamlessly. An apparatus for projection lithography is disclosed. John andrew rouse profile free company director check. Munros electron beam software limited overview free. The device consists of an electron gun with one or more electron beams. In this presentation the ionoptical design of a beam linespectrometer system will be. Our software is used worldwide by many electron microscope manufacturers and by manufacturers of charged particle optical equipment for the semiconductor industry.
The company develops customized electron beam tools and provides technical support for electron beam applications. Munros electron beam software limited free company check. Munro s electron beam software limited free company information from companies house including registered office address, filing history, accounts, annual return, officers, charges, business activity. View munro, erics profile on linkedin, the worlds largest professional community. Mebs provides specialised software for the computer aided design of electron and ion optical systems. Simulation results and experimental data were in a good agreement 4,5. Electron and ion beam equipment play a vital role in the semiconductor manufacturing and nanotechnology industries. The studio operated independently from 1987 until 1999, when it was acquired by infogrames, who changed the name to infogrames melbourne house. Krome studios melbourne, originally melbourne house, was an australian video game development studio founded in 1980 by alfred milgrom and naomi besen and based in melbourne, australia. Munro, eric chairman munros electron beam software ltd. Mebs abbreviation stands for munro s electron beam software.
Munros electron beam software limited filing history. Munro s electron beam software ltd was founded by eric munro, john rouse and xieqing zhu in july 1991, and registered as a united kingdom company. Tolerancing of electron beam lithography columns sciencedirect. The companys line of business includes designing, developing, and producing prepackaged computer software.
Thermal field emission sources and optics for gaussian electronbeam lithography. Ion trajectories in electronimpact ion sources of a quadrupole mass spectrometer were simulated using a computer program co3d, munros electron beam software ltd. Electron optics for low energy electron microscopy marian mankos a, david adler a, lee veneklasen and eric munro b a klatencor, 160 rio robles, san jose, ca, u. Simulation software for designing electron and ion beam.
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